Abstract
High-entropy alloy (HEA) multilayers represent a promising class of advanced coating materials due to their superior mechanical properties, corrosion resistance, and irradiation tolerance. However, the specific role of interface coherency on the creep behavior of HEA multilayers remains unclear. In this work, FCC/BCC Al-Cr-Fe-Ni HEA multilayers with different coherency were prepared by precisely controlling the modulated period (λ) via RF magnetron sputtering. Their room-temperature creep properties were systematically investigated through nanoindentation under different loading rates. The results reveal a strong dependence of creep resistance and deformation mechanisms on the interface coherency. HEA multilayers with semicoherent interfaces (λ = 16 nm) exhibit the highest creep resistance, where creep is primarily mediated by atomic diffusion or interface slip. In contrast, samples dominated by coherent interfaces or grain boundaries (λ = 8, 32, and 80 nm) demonstrate dislocation slip-dominated creep. This work elucidates how interfacial coherency dictates the transition between diffusion-mediated and dislocation-mediated creep mechanisms in HEA multilayers, providing critical insights for the design of next-generation creep-resistant nanostructured coatings.