Abstract
The present study introduces a multi-degree-of-freedom (MDOF) ultrasonic motor, which is capable of driving a spherical rotor using spiral wire stators and a piezoelectric stack actuator. Wire stators and piezoelectric stack actuators enable the proposed motor to be smaller and simpler, lower in power consumption, and have different modes at different frequencies. In this motor, two wire stators are used to drive the spherical rotor and rotate it in different directions. The eigenfrequency and frequency domain analyses were carried out using the finite element method (FEM) to evaluate the MDOF capability of the motor in different vibration modes. It has been demonstrated that the piezoelectric stack actuator can provide MDOF motions through its vibration modes. The resonant frequency obtained by the frequency domain approach agreed with the impedance analyzer test. Rotational speed, torque, and preload force were experimentally investigated. Using shear stress caused by viscous fluid in contact with the spherical rotor, a new torque calculation method was developed. Based on the buoyancy force exerted on the immersed rotor, the preload force was measured. The experimental results indicated that the maximum rotational speed of the spherical rotor was 306 rpm, and the maximum torque was 4.7 μN m.