Abstract
X-ray Photoelectron Spectroscopy (XPS) is a powerful tool for probing the chemical and electronic states of materials with elemental specificity and surface sensitivity. However, its application in the tender X-ray range (1-5 keV) for synchrotron radiation has remained limited due to the limited choice of optics capable of maintaining high reflectivity and efficiency in this energy window. To address this, multilayer (ML) grating structures have become increasingly popular, offering significantly higher efficiency than SL coatings in the tender X-ray region. This paper presents the development of ML laminar gratings optimised for enhancing efficiency in the tender X-ray range, and capable of retaining performance under intense X-ray exposure in the oxygen partial pressure of ∼10[Formula: see text] mbar. The ML coating quality was verified through X-ray reflectivity (XRR), XPS and near-edge X-ray absorption fine structures (NEXAFS) measurements, while the performance of the grating was validated through beamline flux transmission and XPS measurements. The MLLG demonstrated ∼22× higher intensity in flux and XPS, significantly improving the signal-to-noise ratio. Most importantly, the MLLGs outperformed traditional designs by offering improved spectral resolution while maintaining measurement capability at varying [Formula: see text] values without compromising the intensity. Furthermore, we demonstrated that the incorporation of nitrogen during deposition further enhances flux transmission.