Abstract
Various types of nanometer-sized structures have been applied to advanced functional and structural devices. Inherent structures, thermal stability, and properties of such nanostructures are emphasized when their size is decreased to several nanometers, especially, to several atoms. In this study, we observed the atomistic tensile deformation process of zirconium nanocontacts, which are typical nanostructures used in connection of nanometer-sized wires, transistors, and diodes, memory devices, and sensors, by in situ transmission electron microscopy. It was found that the contact was deformed via a plastic flow mechanism, which differs from the slip on lattice planes frequently observed in metals, and that the crystallinity became disordered. The various irregular relaxed structures formed during the deformation process affected the conductance.