Dataset for density/temperature correlation of tetramethylammonium hydroxide solutions of various concentrations

Densities for various Tetramethylammonium hydroxide (TMAH) solutions at different temperatures have been determined based on Archimedes' principle using a hydrostatic balance and a vitreous body with a defined volume. Due to the toxicity of the compound, these data are important especially in the field of wet processing techniques for the automated dosage of TMAH.