Femtosecond Laser Precision Etching of Silver Layer on Silica Aerogel Surfaces

飞秒激光在二氧化硅气凝胶表面精确蚀刻银层

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Abstract

Silica fiber-reinforced silica aerogel (SFRSA) has low dielectric constant, light weight and high temperature resistance characteristics, making it one of the preferred materials for heat-resistant absorptive layers on the surfaces of high-speed aircraft. However, due to its ultra-high porosity, poor rigidity, and sensitivity to organic solvents, existing machining and chemical etching processes struggle to achieve patterned preparation of metallic layers on aerogel substrates. In order to address this issue, the present study employs femtosecond laser etching of the metal layer on the SFRSA surface. Orthogonal experiments were conducted to analyze the impact of different laser process parameters on the etching quality. With straightness as the primary factor, the optimal process parameters obtained were a laser power set to 2.15 W, a laser etching speed of 200 mm/s, and a laser etching time of 9. This achieved an etching width of 26.16 μm, a heat-affected zone of 39.16 μm, and straightness of 7.9 μm. Finally, Raman spectroscopy was used to study laser-ablated samples; thermogravimetric analysis (TGA) and Pyrolysis-Gas Chromatography-Mass Spectrometry analysis (Py-GC-MS) were employed to investigate the changes in the metal layer at high temperatures. A compositional analysis was conducted, revealing a decrease in carbon content within the etched region following laser ablation. The production of CO(2) gas and surface oxidation indicated that laser etching primarily operates via a photothermal mechanism.

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