Abstract
The strong nonlinear absorption effect and “cold” processing characteristics of femtosecond lasers make them uniquely advantageous and promising for the micro- and nanoprocessing of hard and brittle materials, such as quartz. Traditional methods for studying the effects of femtosecond laser parameters on the quality of the processed structure mainly use univariate analysis methods, which require large mounts of experiments to predict and achieve the desired experimental results. The method of design of experiments (DOE) provides a way to predict desirable experimental results through smaller experimental scales, shorter experimental periods and lower experimental costs. In this study, a DOE program was designed to investigate the effects of a serious of parameters (laser repetition frequency, pulse energy, scan speed, scan distance, scan mode, scan times and laser focus position) on the depth and roughness (Ra) of the fabricated structure through the liquid-assisted femtosecond laser processing of quartz. A prediction model between the response variables and the main parameters was defined and validated. Finally, several blind holes with a size of 50 × 50 μm2 and a depth of 200 μm were fabricated by the prediction model, which demonstrated the good consistency of the prediction model.