Abstract
This article presents the design method of a compact MEMS switched-line true-time delay line (TTDL) network over a wide frequency range extending from 2 to 42 GHz using TTDL units. The TTDL units, namely the cascading radio frequency micro-electromechanical system (RF MEMS) switches and GCPW, were employed in the proposed TTDL network to improve the delay-bandwidth product (DBW) while maintaining its compact size and low delay variation (DV). For comparison, a theoretical analysis of the RF MEMS switch was performed while observing the switch performance with various top electrodes. The MEMS TTDL network has a compact size of 5 mm × 5 mm, with a maximum delay of 200 ps and a minimum of 30 ps. The maximum insertion loss of 9 states is 10 dB, and the in/out return loss is better than 20 dB across 2-42 GHz. The group delay variations are within ±2.5% for all the delay states over the operating frequency range. To the best of our knowledge, the proposed TTDL network obtains the most control bits among the TTDL networks offered to date.