Abstract
Feedthrough interference is inevitably introduced in MEMS gyroscopes due to non-ideal factors such as circuit layout design and fabrication processes, exerting non-negligible impacts on gyroscope performance. This study proposes a feedthrough suppression scheme for MEMS gyroscopes based on mixed-frequency excitation signals. Leveraging the quadratic relationship between excitation voltage and electrostatic force in capacitive resonators, the resonator is excited with a modulated signal at a non-resonant frequency while sensing vibration signals at the resonant frequency. This approach achieves linear excitation without requiring backend demodulation circuits, effectively separating desired signals from feedthrough interference in the frequency domain. A mixed-frequency excitation-based measurement and control system for MEMS gyroscopes is constructed. The influence of mismatch phenomena under non-ideal conditions on the control system is analyzed with corresponding solutions provided. Simulations and experiments validate the scheme's effectiveness, demonstrating feedthrough suppression through both amplitude-frequency characteristics and scale factor perspectives. Test results confirm the scheme eliminates the zero introduced by feedthrough interference in the gyroscope's amplitude-frequency response curve and reduces force-to-rebalanced detection scale factor fluctuations caused by frequency split variations by a factor of 21. Under this scheme, the gyroscope achieves zero-bias stability of 0.3118 °/h and angle random walk of 0.2443 °/h/√Hz.