Experiment Comparative Analysis of Feed Rate with Velocity Control in Cutting Mono Crystalline Silicon Using a Diamond Wire Saw

利用金刚石线锯切割单晶硅时,进给速度控制与速度控制的实验对比分析

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Abstract

Fixed-diamond abrasive wire saw cutting is one of the most common methods for cutting hard and brittle materials. This process has unique advantages including a narrow kerf and the ability to use a relatively small cutting force. In the cutting process, controlling the main process parameters can improve the processing efficiency, obtaining a better processing surface roughness. This work designs the PI controller (Proportional-Integral controller) based on the reciprocating wire saw cutting process. The control objects are the workpiece feed rate and wire saw velocity, and the control objective is the normal cutting force. For the control trials, several reference values of various normal cutting forces were chosen. The effects of feed rate and saw velocity on the cutting surface finish and cutting time were investigated in this work using wire saw cutting analysis on a square monocrystalline silicon specimen. The results of this study showed that under a constant applied force of 2.5 N, the optimal feed rate of the diamond wire through the specimen could reduce cutting time by 42% while achieving a 60% improvement in the measured surface finish. Likewise, optimal control of the wire saw velocity could reduce cycle time by 18% with a 45% improvement in the surface finish. Consequently, the feed speed control is more effective than the wire saw velocity.

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