Abstract
Phononic crystals with phononic band gaps varying in different parameters represent a promising structure for sensing. Equipping microchannel sensors with phononic crystals has also become a great area of interest in research. For building a microchannels system compatible with conventional micro-electro-mechanical system (MEMS) technology, SU-8 is an optimal choice, because it has been used in both fields for a long time. However, its mechanical properties are greatly affected by temperature, as this affects the phononic bands of the phononic crystal. With this in mind, the viscous dissipation in microchannels of flowing liquid is required for application. To solve the problem of viscous dissipation, this article proposes a simulation model that considers the heat transfer between fluid and microchannel and analyzes the frequency domain properties of phononic crystals. The results show that when the channel length reaches 1 mm, the frequency shift caused by viscous dissipation will significantly affect detecting accuracy. Furthermore, the temperature gradient also introduces some weak passbands into the band gap. This article proves that viscous dissipation does influence the band gap of phononic crystal chemical sensors and highlights the necessity of temperature compensation in calibration. This work may promote the application of microchannel chemical sensors in the future.