Abstract
Among the different techniques for monitoring the flow rate of various fluids, thermal flow sensors stand out for their straightforward measurement technique. However, the main drawback of these types of sensors is their dependency on the thermal properties of the medium, i.e., thermal conductivity (k), and volumetric heat capacity (ρcp). They require calibration whenever the fluid in the system changes. In this paper, we present a single hot wire suspended above a V-groove cavity that is used to measure k and ρcp through DC and AC excitation for both pure gases and binary gas mixtures, respectively. The unique characteristic of the proposed sensor is its independence of the flow velocity, which makes it possible to detect the medium properties while the fluid flows over the sensor chip. The measured error due to fluctuations in flow velocity is less than ±0.5% for all test gases except for He, where it is ±6% due to the limitations of the measurement setup. The working principle and measurement results are discussed.