Abstract
Defect detection and classification in super-high reflector mirrors and their substrates are crucial for manufacturing laser gyroscope systems. This paper presents a prototype designed to meet the requirements for the reflection and transmission of laser gyroscope mirror substrates. The prototype featured two measurement channels (bright field and dark field) and could detect defects on patterned and unpatterned surfaces. Key components were simulated using Ansys software, (Ansys Workbench 2022 R1)which showed a maximum static deformation of 4.65 μm, a resonant frequency of at least around 230 Hz, and a maximum stress of 9.86 MPa under transportation conditions (GJB150.16A-2009). These results confirm the prototype's stability for optical performance testing and structural design. The experimental testing on laser gyroscope reflector substrates and USAF 1951 plates demonstrated that the prototype effectively detected defects on reflection and transmission surfaces, with a detection resolution that exceeded 170 nm, which met the design requirements.