Three-Dimensional Pulse-Based Modelling of Femtosecond Laser Ablation of Metals: Validation with Grooves

基于三维脉冲的飞秒激光烧蚀金属建模:沟槽验证

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Abstract

The femtosecond (fs) laser ablation of metals is a precise method used to create microfeatures on the surface of the material with a minimized heat-affected zone (HAZ). Despite its many advantages, fs laser ablation often requires extensive trial-and-error experimentation before finding the optimal laser strategy for a desired geometry with minimal HAZ. The pulse-based two-temperature model (TTM) can significantly shorten this process by predicting the ablated geometry based on a set of material and laser parameters. However, this model has only been validated for percussion drilling and single lines. In this study, the pulse-based TTM is tested against parallel line experiments and subsequently modified to include geometry-dependent material parameters. More specifically, the threshold fluence and reflectivity of the material are modified to incorporate the temperature increase inside the standing features between parallel lines. The introduced geometry-dependent factors are fitted with experimental data and their inclusion in the model is shown to have a positive impact on the simulation results. The results show a clear amelioration in the shape and depth of the simulated profiles, with the error on the average depth and width of the modified TTM being lower than the average standard deviation on the experiments.

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