Abstract
With the development of micro/nano satellites and formation flying, more advanced spatial propulsion technology is required. In this paper, a review of microthrusters developments that based on micro electromechanical systems (MEMS) technology adopted in microthrusters is summarized. The microthrusters in previous research are classified and summarized according to the types of propellants and the working principles they utilized. The structure and the performance including the thrust, the impulse and the specific impulse of various microthrusters are compared. In addition, the advantages and the disadvantages of these microthrusters presented in the paper are discussed.