Abstract
We propose a new concept of single-shot deflectometry for real-time measurement of three-dimensional surface profile using a single composite pattern. To retrieve an accurate phase from one-frame composite pattern, we adapt the Fourier Transform (FT) method and the spatial carrier-frequency phase-shifting (SCPS) technique to our proposed deflectometry. Based on Lissajous figure and ellipse fitting method, we also correct the phase extraction error in SCPS technique by reducing the effect of background and modulation variations. The proposed technique is verified by comparing our measurement results with phase-shifting deflectometry, and the maximum difference between two measurement results is less than 30 nm rms. We also test the robustness to vibration and the measurement capability for dynamic object.