Abstract
In the field of micromechanics, piezoelectric actuator has attracted great attention for its high-frequency response, high displacement resolution, and high output force. However, its prospect of practical application has been largely limited by the displacement of micrometer. A fluid coupling flexible actuator was proposed, which utilizes resonance to enlarge the output displacement. The actuator uses a piezoelectric oscillator as an excitation source, fluid as the transmission medium and a flexible diaphragm for the displacement output. On the condition that the fluid is inviscid and incompressible, mathematical formulation of the membrane vibration theory has been analyzed. Then, the prototype is made. The displacement is amplified 21 times to 1.106 mm when driving frequency is 127 Hz. The flexible diaphragm appears the largest displacement output when driving frequency is close to one of the system's natural frequency. Then, the points with zero amplitude form a circle on the surface of flexible diaphragm and the movement direction of the flexible diaphragm is opposite on different sides of the circle. In fact, rather than vibrates at the first resonance frequency, the membrane in the essay is vibrating at a certain higher-order resonance frequency. The experimental results are mainly consistent with the theoretical analysis.