Synthesis of InAl-alloyed Ga(2)O(3) nanowires for self-powered ultraviolet detectors by a CVD method

采用化学气相沉积法合成InAl合金化Ga₂O₃纳米线用于自供电紫外探测器

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Abstract

Ga(2)O(3) is a kind of wide-band gap semiconductor, which has great potential in deep ultraviolet detection because of its high efficiency and fast response. Doping can improve the photoelectric properties of Ga(2)O(3) materials. In this paper, In and Al elements alloyed Ga(2)O(3) nanowires (InAl-Ga(2)O(3) NWs) were successfully grown on p-GaN using a cost-effective chemical vapor deposition method and a vertical structure. The GaN/InAl-Ga(2)O(3) NWs p-n self-powered wide-gap UV photodetector (PD) was constructed based on sputtered gold film as the bottom and top electrodes, and spin coated with polymethyl methacrylate as the insulating layer in the vertical direction. The GaN/InAl-Ga(2)O(3) UV PD exhibits excellent performances, including an extremely low dark current of 0.015 nA, a maximum photocurrent of about 16 nA at zero-bias voltage under 265 nm illumination, and a light-to-dark current ratio greater than 10(3). The responsivity is 0.94 mA W(-1), the specific detectivity is 9.63 × 10(9) jones, and the good fast response/attenuation time is 31.2/69.6 ms. The self-powered characteristics are derived from the internal electric field formed between p-type GaN and n-type InAl-Ga(2)O(3) NWs, which is conducive to the rapid separation and transfer of photogenerated carriers. This work provides an innovative mechanism of high-performance metal oxide nanowires for the application of p-n junction photodetectors, which can operate without any external bias.

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