Abstract
Micromanipulation and biological, material science, and medical applications often require to control or measure the forces asserted on small objects. Here, we demonstrate for the first time the microprinting of a novel fiber-tip-polymer clamped-beam probe micro-force sensor for the examination of biological samples. The proposed sensor consists of two bases, a clamped beam, and a force-sensing probe, which were developed using a femtosecond-laser-induced two-photon polymerization (TPP) technique. Based on the finite element method (FEM), the static performance of the structure was simulated to provide the basis for the structural design. A miniature all-fiber micro-force sensor of this type exhibited an ultrahigh force sensitivity of 1.51 nm μN(-1), a detection limit of 54.9 nN, and an unambiguous sensor measurement range of ~2.9 mN. The Young's modulus of polydimethylsiloxane, a butterfly feeler, and human hair were successfully measured with the proposed sensor. To the best of our knowledge, this fiber sensor has the smallest force-detection limit in direct contact mode reported to date, comparable to that of an atomic force microscope (AFM). This approach opens new avenues towards the realization of small-footprint AFMs that could be easily adapted for use in outside specialized laboratories. As such, we believe that this device will be beneficial for high-precision biomedical and material science examination, and the proposed fabrication method provides a new route for the next generation of research on complex fiber-integrated polymer devices.