Abstract
High-entropy alloys (HEAs) contain more than five alloying elements in a composition range of 5-35% and with slight atomic size variation. Recent narrative studies on HEA thin films and their synthesis through deposition techniques such as sputtering have highlighted the need for determining the corrosion behaviors of such alloys used as biomaterials, for example, in implants. Coatings composed of biocompatible elements such as titanium, cobalt, chrome, nickel, and molybdenum at the nominal composition of Co(30)Cr(20)Ni(20)Mo(20)Ti(10) were synthesized by means of high-vacuum radiofrequency magnetron (HVRF) sputtering. In scanning electron microscopy (SEM) analysis, the coating samples deposited with higher ion densities were thicker than those deposited with lower ion densities (thin films). The X-ray diffraction (XRD) results of the thin films heat treated at higher temperatures, i.e., 600 and 800 °C, revealed a low degree of crystallinity. In thicker coatings and samples without heat treatment, the XRD peaks were amorphous. The samples coated at lower ion densities, i.e., 20 µAcm(-2), and not subjected to heat treatment yielded superior results in terms of corrosion and biocompatibility among all the samples. Heat treatment at higher temperatures led to alloy oxidation, thus compromising the corrosion property of the deposited coatings.