Atomic Layer Deposition of TiO(2) on MoTe(2): Chemical Changes, Band Offsets, and Photophysics

TiO₂在MoTe₂上的原子层沉积:化学变化、能带偏移和光物理

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Abstract

Transition metal dichalcogenides (TMDCs) are well suited to optoelectronic applications due to their strong absorption of a broad spectrum of wavelengths and their layered structure, which permits the assembly of van der Waals heterostructures. The behavior of TMDC-TMO (transition metal oxide) interfaces is an important topic for the potential development of TMDC-based optoelectronics, as they may be effective either as active components of optoelectronic devices or as interlayers between TMDCs and metals, improving contact efficiencies. Here, TiO(2)-MoTe(2) junctions were studied to determine the effectiveness of TiO(2) synthesized with atomic layer deposition (ALD) as a potential charge-separating layer for MoTe(2). Band alignments measured with X-ray photoelectron spectroscopy (XPS) suggested a driving force for carrier separation. However, transient absorption spectroscopy (TAS) showed no evidence of charge injection, with relaxation mechanisms and lifetimes changing minimally after the deposition of TiO(2). High exciton binding energies are proposed as a likely cause of this behavior. XPS was also used to analyze the interface chemistry of the heterojunctions, revealing the formation of a thin MoO (x) layer on bare MoTe(2) samples, which was partially reduced during the process of TiO(2) deposition. This work provides important information about chemical changes and the resulting electronic behavior of interfaces between two-dimensional (2D) and three-dimensional (3D) solids.

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