High-speed, scanned laser structuring of multi-layered eco/bioresorbable materials for advanced electronic systems

用于先进电子系统的多层生态/生物可吸收材料的高速扫描激光结构化

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作者:Quansan Yang #, Ziying Hu #, Min-Ho Seo, Yameng Xu, Ying Yan, Yen-Hao Hsu, Jaime Berkovich, Kwonjae Lee, Tzu-Li Liu, Samantha McDonald, Haolin Nie, Hannah Oh, Mingzheng Wu, Jin-Tae Kim, Stephen A Miller, Ying Jia, Serkan Butun, Wubin Bai, Hexia Guo, Junhwan Choi, Anthony Banks, Wilson Z Ray, Yevgeni

Abstract

Physically transient forms of electronics enable unique classes of technologies, ranging from biomedical implants that disappear through processes of bioresorption after serving a clinical need to internet-of-things devices that harmlessly dissolve into the environment following a relevant period of use. Here, we develop a sustainable manufacturing pathway, based on ultrafast pulsed laser ablation, that can support high-volume, cost-effective manipulation of a diverse collection of organic and inorganic materials, each designed to degrade by hydrolysis or enzymatic activity, into patterned, multi-layered architectures with high resolution and accurate overlay registration. The technology can operate in patterning, thinning and/or cutting modes with (ultra)thin eco/bioresorbable materials of different types of semiconductors, dielectrics, and conductors on flexible substrates. Component-level demonstrations span passive and active devices, including diodes and field-effect transistors. Patterning these devices into interconnected layouts yields functional systems, as illustrated in examples that range from wireless implants as monitors of neural and cardiac activity, to thermal probes of microvascular flow, and multi-electrode arrays for biopotential sensing. These advances create important processing options for eco/bioresorbable materials and associated electronic systems, with immediate applicability across nearly all types of bioelectronic studies.

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