Abstract
Real-time radiation monitoring at the single-particle level is an unmet need for electron radiotherapy, especially for dose deposition to targets in motion or critical OARs. We have developed a first-in-class CMOS-based 0.05 mm(3) single electron sensitive detector. The chiplet integrates all the requisite electronics. The functionality of the system is verified under 6 and 9 MeV clinical electron beams. Percentage depth vs. pulse-width curves for 6 and 9 MeV beams are measured and verified using Monte-Carlo simulations. The proposed system has the potential to enhance the electron radiotherapy quality and safety, providing real-time dosimetry from multiple sites simultaneously.