Abstract
In this study, we present a novel surface-enhanced Raman scattering (SERS) substrate based on porous silicon microcavities (PSiMCs) decorated with silver nanoparticles (AgNPs) for ultra-sensitive molecule detection. This substrate utilizes a dual enhancement mechanism: the localized surface plasmon resonance (LSPR) of AgNPs and the optical resonance of the PSiMC structure, which together create intense electromagnetic hot spots and prolong photon-molecule interactions. The porous architecture provides a large surface area for uniform nanoparticle distribution and efficient analyte adsorption. The AgNP/PSiMC substrate demonstrates an impressive detection limit of 1.0 × 10(-13) M for rhodamine101 and 1.0 × 10(-10) M for methyl parathion, outperforming many previously reported SERS platforms. Furthermore, the substrate exhibits excellent signal uniformity (RSD ≈ 6.14%) and long-term stability, retaining over 50% signal intensity after 28 days. These results underscore the potential of AgNP/PSiMCs as highly efficient, reproducible, and scalable SERS platforms for trace-level chemical and environmental sensing applications.