The ESD Robustness and Protection Technology of P-GaN HEMT

P-GaN HEMT的ESD鲁棒性和保护技术

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Abstract

This work first analyzes the failure behaviors of P-GaN HEMTs with different gate structures (Schottky gate vs. Ohmic gate) under both forward and reverse ESD stresses. It reveals that the Schottky gate structure lacks effective electrostatic charge discharge paths, which leads to the accumulation of transient charges generated by ESD stress in the gate terminal, resulting in significant transient overvoltage and ultimately causing breakdown failure. Subsequently, the paper systematically reviews three existing unidirectional ESD protection technologies based on the P-GaN HEMT platform. While these technologies can discharge transient electrostatic charges generated by both forward and reverse ESD stresses, they operate in diode mode during reverse ESD events, exhibiting excessively low reverse triggering voltage. Furthermore, unidirectional ESD protection structures based on resistive voltage division and diode voltage division introduce substantial forward and reverse leakage currents. Finally, the article evaluates four bidirectional GaN ESD protection technologies. These bidirectional structures can likewise discharge transient charges from both forward and reverse ESD stresses. Compared to unidirectional approaches, the key advantage of bidirectional ESD protection lies in its ability to provide an appropriate reverse triggering voltage during reverse ESD events, thereby effectively clamping the reverse potential to the desired level. However, likewise, bidirectional ESD protection schemes based on resistive or diode voltage division also inevitably introduce relatively large forward and reverse leakage currents.

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