Abstract
The fluorination of the polymer polyethylene terephthalate in plasma created from SF₆ or CF₄ gas at various pressures was investigated. The surface was analysed by X-ray photoelectron spectroscopy and water contact angle measurements, whereas the plasma was characterized by optical emission spectroscopy. The extent of the polymer surface fluorination was dependent on the pressure. Up to a threshold pressure, the amount of fluorine on the polymer surface and the surface hydrophobicity were similar, which was explained by the full dissociation of the SF₆ and CF₄ gases, leading to high concentrations of fluorine radicals in the plasma and thus causing the saturation of the polymer surface with fluorine functional groups. Above the threshold pressure, the amount of fluorine on the polymer surface significantly decreased, whereas the oxygen concentration increased, leading to the formation of the hydrophilic surface. This effect, which was more pronounced for the SF₆ plasma, was explained by the electronegativity of both gases.