Abstract
In this review, we introduce recently developed plasma-based approaches for depositing and treating piezoelectric nanoparticles (NPs) and piezoelectric polymer films for nanogenerator (NG) and sensor applications. We also present the properties and an overview of recently synthesized or modified piezoelectric materials on piezoelectric polymers to highlight the existing challenges and future directions of plasma methods under vacuum, low pressure, and ambient air conditions. The various plasma processes involved in piezoelectric NGs and sensors, including plasma-based vapor deposition, dielectric barrier discharge, and surface modification, are introduced and summarized for controlling various surface properties (etching, roughening, crosslinking, functionalization, and crystallinity).