Complementary Metal-Oxide-Semiconductor Potentiometric Field-Effect Transistor Array Platform Using Sensor Learning for Multi-ion Imaging

基于传感器学习的互补金属氧化物半导体电位场效应晶体管阵列平台用于多离子成像

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Abstract

This work describes an array of 1024 ion-sensitive field-effect transistors (ISFETs) using sensor-learning techniques to perform multi-ion imaging for concurrent detection of potassium, sodium, calcium, and hydrogen. Analyte-specific ionophore membranes are deposited on the surface of the ISFET array chip, yielding pixels with quasi-Nernstian sensitivity to K(+), Na(+), or Ca(2+). Uncoated pixels display pH sensitivity from the standard Si(3)N(4) passivation layer. The platform is then trained by inducing a change in single-ion concentration and measuring the responses of all pixels. Sensor learning relies on offline training algorithms including k-means clustering and density-based spatial clustering of applications with noise to yield membrane mapping and sensitivity of each pixel to target electrolytes. We demonstrate multi-ion imaging with an average error of 3.7% (K(+)), 4.6% (Na(+)), and 1.8% (pH) for each ion, respectively, while Ca(2+) incurs a larger error of 24.2% and hence is included to demonstrate versatility. We validate the platform with a brain dialysate fluid sample and demonstrate reading by comparing with a gold-standard spectrometry technique.

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