Abstract
Stick-slip piezoelectric actuators are widely used in high-precision positioning systems, yet their performance is limited by backward motion during the slip stage. Although the effects of preload force, driving voltage, and driving frequency have been extensively examined, the specific influence of mover mass and its coupling with these parameters remains insufficiently understood. This study aims to clarify the mass-dependent stepping behavior of stick-slip actuators and to provide guidance for structural design. A compact stick-slip actuator incorporating a lever-type amplification mechanism is developed. Its deformation amplification capability and structural reliability are verified through motion principle analysis, finite element simulations, and modal analysis. A theoretical model is formulated to describe the inverse dependence of backward displacement on the mover mass. Systematic experiments conducted under different mover masses, preload forces, voltages, and frequencies demonstrate that the mover mass directly affects stepping displacement and interacts with input conditions to determine motion linearity and backward-slip suppression. Light movers exhibit pronounced backward motion, whereas heavier movers improve smoothness and stepping stability, although excessive mass slows the dynamic response. These results provide quantitative insight into mass-related dynamic behavior and offer practical guidelines for optimizing the performance of stick-slip actuators in precision motion control.