Abstract
Zinc oxide is a promising material for the creation of various types of sensors, in particular UV detectors. In this work, arrays of ordered nanorods were grown by chemical vapor deposition. The effect of environmental humidity on the sensing properties of zinc oxide nanorod arrays was investigated, and a prototype UV sensor using indium as an ohmic contact was developed. UV photoresponses were measured for the samples stored in dry and wet atmospheres. The increase in sensitivity and response of the ZnO nanorod arrays was observed after prolonged exposure to a wet atmosphere. A model was proposed to explain this effect. This is due to the formation of hydroxyl groups on the surface of zinc oxide nanorods, which is confirmed by FTIR spectroscopy data. For the first time, it has been shown that after storage in a wet atmosphere, the sensory properties of the structure remain stable regardless of the ambient humidity.