Chemical vapour deposition (CVD) of nickel oxide using the novel nickel dialkylaminoalkoxide precursor [Ni(dmamp')2] (dmamp' = 2-dimethylamino-2-methyl-1-propanolate)

使用新型镍二烷基氨基醇盐前体 [Ni(dmamp')2](dmamp' = 2-二甲氨基-2-甲基-1-丙醇盐)进行氧化镍的化学气相沉积 (CVD)

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作者:Rachel L Wilson, Thomas J Macdonald, Chieh-Ting Lin, Shengda Xu, Alaric Taylor, Caroline E Knapp, Stefan Guldin, Martyn A McLachlan, Claire J Carmalt, Chris S Blackman

Abstract

Nickel oxide (NiO) has good optical transparency and wide band-gap, and due to the particular alignment of valence and conduction band energies with typical current collector materials has been used in solar cells as an efficient hole transport-electron blocking layer, where it is most commonly deposited via sol-gel or directly deposited as nanoparticles. An attractive alternative approach is via vapour deposition. This paper describes the chemical vapour deposition of p-type nickel oxide (NiO) thin films using the new nickel CVD precursor [Ni(dmamp')2], which unlike previous examples in literature is synthesised using the readily commercially available dialkylaminoalkoxide ligand dmamp' (2-dimethylamino-2-methyl-1-propanolate). The use of vapour deposited NiO as a blocking layer in a solar-cell device is presented, including benchmarking of performance and potential routes to improving performance to viable levels.

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