Abstract
CaTiO3 films with an average thickness of 0.5 nm were deposited onto γ-Al2O3 by Atomic Layer Deposition (ALD) and then characterized by a range of techniques, including X-ray Diffraction (XRD) and High-Resolution, Transmission Electron Microscopy (HRTEM). The results demonstrate that the films form two-dimensional crystallites over the entire surface. Lattice fringes from HRTEM indicate that the crystallites range in size from 5 to 20 nm and are oriented in various directions. Films of the same thickness on SiO2 remained amorphous, indicating that the support played a role in forming the crystallites.