Ultralow-Resistance Contacts to Heavily Doped p-Type Nb(x)W(1-x)S(y) Thin Films Grown by Atomic Layer Deposition
采用原子层沉积法制备重掺杂p型Nb(x)W(1-x)S(y)薄膜的超低电阻接触
期刊:ACS Applied Materials & Interfaces
影响因子:8.2
doi:10.1021/acsami.4c16889
Li, Ruixue; Schulpen, Jeff J P M; Dawley, Rebecca A; Hirshberg, Nitzan; Odlyzko, Michael L; Lee, Seungjun; Hoque, Khondker Shihabul; Low, Tony; McLeod, Alexander S; Bol, Ageeth A; Koester, Steven J