A review of piezoelectric MEMS sensors and actuators for gas detection application
压电式MEMS传感器和执行器在气体检测应用中的综述
期刊:Discover Nano
影响因子:4.5
doi:10.1186/s11671-023-03779-8
Ba Hashwan, Saeed S; Khir, Mohd Haris Md; Nawi, Illani Mohd; Ahmad, Mohamad Radzi; Hanif, Mehwish; Zahoor, Furqan; Al-Douri, Y; Algamili, Abdullah Saleh; Bature, Usman Isyaku; Alabsi, Sami Sultan; Sabbea, Mohammed O Ba; Junaid, Muhammad