Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces
晶圆级纳米加工技术在等离子体超表面中制造亚5纳米间隙
期刊:Nanophotonics
影响因子:6.6
doi:10.1515/nanoph-2024-0343
Gour, Jeetendra; Beer, Sebastian; Paul, Pallabi; Alberucci, Alessandro; Steinert, Michael; Szeghalmi, Adriana; Siefke, Thomas; Peschel, Ulf; Nolte, Stefan; Zeitner, Uwe Detlef