Effect of Growth Temperature and Atmosphere Exposure Time on Impurity Incorporation in Sputtered Mg, Al, and Ca Thin Films
生长温度和气氛暴露时间对溅射Mg、Al和Ca薄膜中杂质掺入的影响
期刊:Materials
影响因子:3.2
doi:10.3390/ma16010414
Aliramaji, Shamsa; Keuter, Philipp; Neuß, Deborah; Hans, Marcus; Primetzhofer, Daniel; Depla, Diederik; Schneider, Jochen M