High-fidelity chip delayering using green (515 nm) femtosecond lasers
利用绿色(515纳米)飞秒激光器进行高保真芯片分层
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-026-35091-7
Anaei, Mohammad Taghi Mohammadi; Maniscalco, Matthew; Choi, Hongbin; Emanuel, Marcus; Roser, Wesley; Bliznakov, Todor; Moore, Toni; Phoulady, Adrian; Mahyari, Parisa; Blagojevic, Alexander; May, Nicholas; Egan, Garth C; Shahbazmohamadi, Sina; Tavousi, Pouya