Towards a MEMS Force Sensor via the Electromagnetic Principle
基于电磁原理的MEMS力传感器
期刊:Sensors
影响因子:3.5
doi:10.3390/s23031241
Hartansky, Rene; Mierka, Martin; Jancarik, Vladimir; Bittera, Mikulas; Halgos, Jan; Dzuris, Michal; Krchnak, Jakub; Hricko, Jaroslav; Andok, Robert