The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes
弯曲梁宽度变化对MEMS陀螺仪正交误差偏差的影响
期刊:Micromachines
影响因子:3
doi:10.3390/mi13050655
Azier, Alexandre; Kacem, Najib; Chaumet, Bernard; Bouhaddi, Noureddine
