Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography
从电子束到紫外纳米压印光刻技术的硅金属透镜制造
期刊:Nanomaterials
影响因子:4.3
doi:10.3390/nano11092329
Baracu, Angela Mihaela; Avram, Marius Andrei; Breazu, Carmen; Bunea, Mihaela-Cristina; Socol, Marcela; Stanculescu, Anca; Matei, Elena; Thrane, Paul Conrad Vaagen; Dirdal, Christopher Andrew; Dinescu, Adrian; Rasoga, Oana