Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography
用于光学相干断层扫描的双轴电热MEMS微扫描器的设计与制造
期刊:Sensors
影响因子:3.5
doi:10.3390/s18113755
Gioffré, Mariano; Coppola, Giuseppe; Iodice, Mario; Casalino, Maurizio; Tanguy, Quentin A A; Bargiel, Sylwester; Xie, Huikai; Passilly, Nicolas; Barthès, Magali; Gaiffe, Olivier; Rutkowski, Jaroslaw; Lutz, Philippe; Gorecki, Christophe