Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation
具有光学干涉读出和集成静电驱动的微机械加速度计
期刊:Journal of Microelectromechanical Systems
影响因子:3.1
doi:10.1109/JMEMS.2007.910243
Hall, Neal A; Okandan, Murat; Littrell, Robert; Serkland, Darwin K; Keeler, Gordon A; Peterson, Ken; Bicen, Baris; Garcia, Caesar T; Degertekin, F Levent