Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response
采用级联柔性梁和硅梁的多模态MEMS振动能量采集器,用于超低频响应
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-023-00500-8
Feng, Haizhao; Bu, Ling; Li, Zhangshanhao; Xu, Sixing; Hu, Bingmeng; Xu, Minghao; Jiang, Siyao; Wang, Xiaohong