Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta(2)O(5) thin films during thermal treatments
热处理过程中离子束溅射Ta(2)O(5)薄膜的氩释放、结晶、形貌和光学变化
期刊:Heliyon
影响因子:3.6
doi:10.1016/j.heliyon.2025.e42009
Paolone, A; Bazzan, M; Favaro, G; Borondics, F; Nemeth, G; Capitani, F; Swaraj, S; Belkhou, R; Flammini, R; Teillon, J; Michel, C; Hofman, D; Granata, M