Impact of parameter variation in fabrication of nanostructure by atomic force microscopy nanolithography
参数变化对原子力显微镜纳米光刻法制备纳米结构的影响
期刊:PLoS One
影响因子:2.6
doi:10.1371/journal.pone.0065409
Dehzangi, Arash; Larki, Farhad; Hutagalung, Sabar D; Goodarz Naseri, Mahmood; Majlis, Burhanuddin Y; Navasery, Manizheh; Hamid, Norihan Abdul; Noor, Mimiwaty Mohd