Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly(Methyl Methacrylate) for Hybrid Resist Applications
有机金属Hf气相渗入聚甲基丙烯酸甲酯的机理及其在混合光刻胶应用中的应用
期刊:Chemistry of Materials
影响因子:7
doi:10.1021/acs.chemmater.5c02369
Chowdhury, Md Istiaque; Wu, Xinpei; Lee, Won-Il; Sun, Peter; Ahmad, Mueed; Kisslinger, Kim; Sadowski, Jerzy T; Tenney, Samuel A; Boscoboinik, Jorge Anibal; Tiwale, Nikhil; Nam, Chang-Yong