Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment
通过优化氮化铝籽晶层的结晶度和极性排列来提高薄膜体声学谐振器的性能
期刊:Nature Communications
影响因子:15.7
doi:10.1038/s41467-026-69096-7
Yang, Tingting; Xu, Qinwen; Wang, Yaxin; Cai, Yao; Li, Haiyang; Zheng, Yupeng; Zeng, Min; Qu, Jingyi; Li, Lei; Gao, Chao; Gu, Xiyu; Lin, Binghui; Guo, Shishang; Lei, Cheng; Liu, Sheng; Sun, Chengliang