Investigation of the High Mobility IGZO Thin Films by Using Co-Sputtering Method
利用共溅射法研究高迁移率IGZO薄膜
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-017-07808-2
Lee, Kwanjae; Choi, Ilgyu; Lee, Cheul-Ro; Chung, Tae-Hoon; Kim, Yoon Seok; Jeong, Kwang-Un; Chung, Dong Chul; Kim, Jin Soo; Hsu, Chao-Ming; Tzou, Wen-Cheng; Yang, Cheng-Fu; Liou, Yu-Jhen