Fabrication of Aluminum Oxide Thin-Film Devices Based on Atomic Layer Deposition and Pulsed Discrete Feed Method
基于原子层沉积和脉冲离散进给法的氧化铝薄膜器件制备
期刊:Micromachines
影响因子:3
doi:10.3390/mi14020279
Lin, Shih-Chin; Wang, Ching-Chiun; Tien, Chuen-Lin; Tung, Fu-Ching; Wang, Hsuan-Fu; Lai, Shih-Hsiang