High-Performance P- and N-Type SiGe/Si Strained Super-Lattice FinFET and CMOS Inverter: Comparison of Si and SiGe FinFET
高性能 P 型和 N 型 SiGe/Si 应变超晶格 FinFET 和 CMOS 反相器:Si 和 SiGe FinFET 的比较
期刊:Nanomaterials
影响因子:4.3
doi:10.3390/nano13081310
Yao, Yi-Ju; Yang, Ching-Ru; Tseng, Ting-Yu; Chang, Heng-Jia; Lin, Tsai-Jung; Luo, Guang-Li; Hou, Fu-Ju; Wu, Yung-Chun; Chang-Liao, Kuei-Shu